Vibration Analysis of A Micromachined Modal Gyroscope Based on Elastic Body
Micromachined modal gyroscope based on elastic body (MMGEB) is a novel kind of rotating rate sensor, which has large stiffness and robust resistance to shake and strike because there is no evident massspring component in its structure. In this paper, the model and working mechanism of MMGEB are proposed first. The modal analysis, the harmonic analysis and Coriolis analysis for the model by the finite element method (FEM) have been conducted. The research in the paper provides theoretical foundation for realizing this micromachined gyroscope.
micromachined gyroscope modal harmonic Coriolis
Zheng Wang Xiaosheng Wu Xiaojun Hu Wenyuan Chen Weiping Zhang
National Key Laboratory of Science and Technology on Micro/Nano Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240, Peopes Republic of China
国际会议
合肥
英文
4236-4239
2011-09-23（万方平台首次上网日期，不代表论文的发表时间）