Aluminum-Doped Zinc Oxide as Transparent Electrode Materials
Pristine and Al-doped zinc oxide nanopowders were synthesized via a surfactant-assisted complex sol-gel method, possessing a pure ZnO phase structure and controllable grain size which was characterized by X-ray diffraction and scanning electron microscopy. Using these nanopowders, the pristine and Al-doped ZnO magnetron sputtering targets were prepared following a mold-press, cold isostatical-press and schedule sintering temperature procedure. The relative density of these as-prepared targets was tested by Archimedesmethod on densitometer. All of the results were above 95 theory density percents, and the resistivity was tested on four-probe system at a magnitude of 10-2 Ωcm. Related pristine ZnO thin films and Al-doped ZnO thin films were fabricated by magnetron sputtering method, respectively. The pristine and Al-doped ZnO films deposited on the quartz glass by dc sputtering owned a (002) orientation with a thickness of 350 nm at a deposition power of 100 W for two hours under an argon plasma. A good optical transparency above 80％ and low resistivity of 1.60×10-3 Ω. cm were obtained with a deposition temperature of 573 K. The optical energy bandgap could be tailored by Al doping at 4 at.％ Al.
Al-doped ZnO sputtering target thin film electrical optical
Yulong Zhang Xianpeng Zhang Ruiqin Tan Ye Yang Junhua Zhao Weiyan Wang Ping Cui Weijie Song
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, No.519Zhuangsh College of Information Science and Engineering, Ningbo University, Ningbo, No. 818 FenghuaRoad, Jian Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, No.519 Zhuangs
国际会议
11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)
青岛
英文
6-12
2010-09-25（万方平台首次上网日期，不代表论文的发表时间）