Thermal Stability of Aluminum Doped Zinc Oxide Thin Films

摘要：

Transparent conductive oxides are key electrode materials for thin film solar cells. Aluminum doped zinc oxide has become one of the most promising transparent conductive oxide (TCO) materials because of its excellent optical and electrical properties. In this work, aluminum doped zinc oxide thin films were prepared using RF magnetron sputtering of a 4 at％ ceramic target. The thermal stability of aluminum doped zinc oxide thin films was studied using various physical and structural characterization methods. It was observed that the electrical conductivity of aluminum doped zinc oxide thin films deteriorated rapidly and unevenly when it was heated up to 350 ℃. When the aluminum doped zinc oxide thin films were exposed to UV ozone for a short time before heating up, its thermal stability and large area homogeneity were significantly improved. The present work provided a novel method for improving the durability of aluminum doped zinc oxides as transparent conductive electrodes in thin film solar cells.

关键词： AZO thin film thermal stability UV ozone treatment

作者: Jinhua Huang Ruiqin Tan Jia Li Yulong Zhang Ye Yang Weijie Song

作者单位: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences,Ningbo, 315201, Faculty of Information Science and Engineering, Ningbo University, Ningbo, 315211, China

会议类型: 国际会议

会议名称: 11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)

会议地点: 青岛

会议语种:英文

页码: 147-151

在线出版日期: 2010-09-25（万方平台首次上网日期，不代表论文的发表时间）