Improving the Bonding Strength of Y2O3 Coatings on Steel Substrates through a YOx Adhesion Layer
Y2O3/YOx composite coatings with different YOx adhesion layers were fabricated on 316L stainless steel substrates through reactive magnetron sputtering. The YOx adhesion layers were deposited by radio frequency reactive magnetron sputtering with different oxygen partial pressures at a total pressure of 1.2 Pa. The Y2O3 coatings were deposited by bipolar pulse reactive magnetron sputtering. The relationships between the microstructures, phase compositions, interfacial adhesion of the composite coatings and the oxygen partial pressure used for deposition of the YOx adhesion layers were investigated. The microstructures and phase compositions of the coatings were characterized by scanning electronic microscopy and X-ray diffraction. The bonding strength of the coatings was measured by scratch tester. The results showed that the bonding strength of the Y2O3/YOx composite coatings reached the maximum value when the oxygen partial pressure was 0.18 Pa.
Yttrium Oxide Adhesion Layer Magnetron Sputtering Bonding Strength
Weiling Lv Jun Liu Tao Tang Ling Yang Rong Lei Lijie Qiao Jiangli Cao
Institute for Advanced Materials and Technology, University of Science and Technology Beijing,Beijin Science and Technology on Surface Physics and Chemistry Laboratory, P.O. Box 718-35,Mianyang 621907, Institute for Advanced Materials and Technology, University of Science and Technology Beijing,Beijin Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beiji
国际会议
11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)
青岛
英文
637-640
2010-09-25（万方平台首次上网日期，不代表论文的发表时间）