Effect of Annealing on Structural and Optical Properties of Zr Doped ZnO Film Grown by RF Magnetic Sputtering

摘要：

Zinc oxide (ZnO) and Zirconium (Zr) doped ZnO nano films have been successfully fabricated by radio frequency (RF) magnetic sputtering. The crystal structure and morphology were investigated by X-ray Diffraction (XRD), Field Emission-Scanning Electron Microscope (FE-SEM) and Transmission Electron Microscope (TEM). As the doped Zr content increases, ZnO nano films show various morphologies. The optical band gap of pure ZnO films increases from 3.27 eV to 3.53 eV with Zr concentration increasing to 9.66 at.％. After annealing, the polycrystalline structure of ZnO changes a little and the energy gap decreases. In addition, the clean and lower doped ZnO films show much lower transmittance.

关键词： Zinc oxide Doping Optical properties

作者: J. Wang C.Y. Zhang Z.G. Wu P.X. Yan

作者单位: School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China State Key Labor

会议类型: 国际会议

会议名称: 11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)

会议地点: 青岛

会议语种:英文

页码: 696-705

在线出版日期: 2010-09-25（万方平台首次上网日期，不代表论文的发表时间）