Influence of Magnetic Field Thermal Annealing on the High- Frequency Performance of the FeCo-Based Granular Thin Films
A series of FeCoHfO granular films were fabricated by reactive DC magnetron reactive sputtering at varying partial pressure of oxygen and annealed by magnetic field thermal annealing. By using magnetic field annealing method suitably, the soft magnetic properties of FeCoHfO granular thin films are improved obviously. The optimal annealing temperature and annealing time are 350℃ and 20 minute, respectively. The films with desired properties of low coercivity, Hc~2Oe, relatively high saturation magnetization, 4πMs~20.5 kG, high anisotropy field Hk~50Oe, and high electrical resistivity ρ~ 1875μΩcm and natural ferromagnetic resonant frequency about 3 GHz have been obtained.
FeCoHfO films magnetic field annealing high-frequency application
Guang-duo Lu Huai-wu Zhang Xiao-li Tang Yuan-xun Li Zhi-yong Zhong
State Key Laboratory of Electronic Thin films and Integrated Devices, University of ElectronicScienc State Key Laboratory of Electronic Thin films and Integrated Devices, University of Electronic Scien
国际会议
11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)
青岛
英文
99-105
2010-09-25（万方平台首次上网日期，不代表论文的发表时间）