Microstructure and Wear-resistant SiC Film by RF Magnetron Sputtering
A wear-resistant SiC (silicon carbon) film on titanium substrate was prepared by magnetron sputtering technology. The film exhibits low nano-hardness of 12.1 GPa and low Youngs modulus of 166.2 GPa together with superior friction/wear properties. As sliding against Si3N4 (silicon nitride) ball (2 mm in radius) at room temperature under Kokubo simulation body fluid condition, the film exhibited the friction coefficient of about 0.215 and the special wear rate in the order of magnitude of 10.5 mm3/ Nm even at the load of 500g without film cracking and interface delaminating. The high film-cracking and interface-delaminating resistance is due to the low hardness of the film and the good film/substrate modulus match caused by the low elastic modulus of the film.
SiC film Friction and wear Load-bearing capacity Simulation body fluid
K. Tian X.J. Xu Z. Fan X.N. Hao D. Chen X.L. Xin X.L. Sheng
Institute of Advanced Forming Technology, Jiangsu University, Zhenjiang 212013, China
国际会议
11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)
青岛
英文
580-584
2010-09-25（万方平台首次上网日期，不代表论文的发表时间）