Tribological properties of hydrogenated amorphous carbon (a-C:H) films on aluminium alloy substrate under different substrate bias voltages

摘要：

Hydrogenated amorphous carbon (a-C:H) films were deposited on aluminium alloy substrates by microwave electron cyclotron resonance chemical vapor deposition(ECR-PECVD) at different substrate pulse bias voltage. In order to enhance the interface bonding strength between the film and Al alloy substrate, a 50nm silicon film was firstly fabricated on aluminium alloy substrate by unbalanced magnetron sputtering. The fiction and wear properties of the a-C:H films were evaluated using a ball-on-disk tribometer in air at room temperature. The results showed that the tribological properties of the a-C:H films decreased with the substrate bias voltage increased from -150 to -1000V. The a-C:H films deposited at -150V bias voltage had the best wear resistance.

关键词： hydrogenated amorphous carbon aluminium alloy microwave electron cyclotron resonance chemical vapor deposition bias voltage tribological property

作者: X.Gui Y.Y. Su S.Y. Li J. Mei H.Sun Y.X.Leng N.Huang

作者单位: Key Laboratory for Advanced Technology of Material, Ministry of Education, School of MaterialScience Chinese Academy of Engineering Physics, Mianyang 621000, China Key Laboratory for Advanced Technology of Material, Ministry of Education, School of Material Scienc

会议类型: 国际会议

会议名称: 11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)

会议地点: 青岛

会议语种:英文

页码: 784-790

在线出版日期: 2010-09-25（万方平台首次上网日期，不代表论文的发表时间）