Gas Sensing Properties of ZnO Thin Film/Si Heterojunction to Alcohols
The polycrystalline zinc oxide (ZnO) film was deposited on p-Si substrate by radio-frequency (RF) magnetron sputtering. The structure and morphology of the ZnO thin films are characterized by X-ray diffraction (XRD), the energy dispersive analysis of X-ray (EDX) and scanning electron microscope (SEM). The gas sensing properties of the ZnO/Si heterojunctions for alcohols with different chain lengths were investigated at room temperature. It is found that the current-voltage (Ⅰ-Ⅴ) characteristics of the ZnO/Si heterojunctions are sensitive to isopropanol, ethanol and methanol gas. We discussed a possible gas sensing mechanism of ZnO/Si heterojunction. The sensitivity of the ZnO/Si heterojunctions to the gases decreases from isopropanol to methanol and to ethanol at the same concentration. It can be explained by the volume effect and electron donating effect.
Electrical Properties Thin films Sensors Alcohols
Xiaoyan Zhou Ming Ma Qingzhong Xue
College of Physics Science and Technology, China University of Petroleum,Dongying, Shandong 257061, College of Physics Science and Technology, China University of Petroleum, Dongying, Shandong 257061,
国际会议
11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)
青岛
英文
798-802
2010-09-25（万方平台首次上网日期，不代表论文的发表时间）