Application of secondary electron composition contrast imaging method in microstructure studies on cathode materials of TWT

摘要：

The study of the secondary electron composition contrast imaging method have been developed with a conventional scanning electron microscope (SEM) equipped with ultra-thin window energy dispersive X-ray spectrometer (EDS). On the basis of the study of the principle of secondary electron emission, secondary electron composition contrast imaging method has been investigated, and the ranges of its application were also discussed. This method was applied in the microstructure studies on cathode materials of TWT (traveling wave tube). The results showed that, compared with backscattered electron image, the secondary electron image could also reveal composition contrast well in certain conditions. Furthermore, the resolution of secondary electron composition contrast image is higher. In some cases, the secondary electron image could distinguish impurities which might bring wrong results. In the microstructure studies on cathode materials of TWT, compared with backscattered electron image, secondary electron composition contrast imaging method is reasonable and practicable.

关键词： secondary electron composition contrast SEM cathode materials

作者: Peng Li Sheng-xiang Bao De-zheng Zhang Li-bo Zhuang Li-li Ma

作者单位: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of ElectronicScienc State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Scien

会议类型: 国际会议

会议名称: 11th IUMRS International Conference in Asia(第十一届国际材联亚洲材料大会 IUMRS-ICA 2010)

会议地点: 青岛

会议语种:英文

页码: 255-259

在线出版日期: 2010-09-25（万方平台首次上网日期，不代表论文的发表时间）