Reflection type displacement sensor with volume hologram for in-plane displacement measurement

摘要：

In this study, we proposed a in-plane displacement measurement which consisted of reflection type displacement sensor and heterodyne interferometer. The displacement sensor is fabricated by volume hologram which recorded the interference signal and became the reflection type diffracted grating. Based on the optical configuration of the heterodyne interferometer, the diffraction beams will interfere and possess the information of the displacement of the sensor. To analysis the heterodyne interference signal with lock-in technique, the in-plane displacement can be obtained simultaneously. According to our results, the subnanometer resolution can be accomplished.

关键词： Displacement sensor Heterodyne Interferometry Phase measurement Diffraction grating

作者: Cheng-Chih Hsu Meng-Chun Kao Kuan-Chung Huang Chyan-Chyi Wu

作者单位: Department of Photonics Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li, 32003 Taiwan Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 25137 Taiwa

会议类型: 国际会议

会议名称: 2012 International Conference on Measurement,Information and Control(2012测量、信息与控制国际会议 ICMIC2012)

会议地点: 哈尔滨

会议语种:英文

页码: 13-16

在线出版日期: 2012-05-18（万方平台首次上网日期，不代表论文的发表时间）