Application of the Simulated Annealing - Simplex Hybrid Algorithm to the Ellipsometric Data Inversion of Double Films

摘要：

With an effective combination of advantages of the simulated annealing algorithm and the simplex algorithm, a new simulated annealing-simplex hybrid algorithm is presented to deal with the ellipsometric data inversion of double films. In experiments of single wavelength measurement, any two optical parameters of double layer films can be extracted with a measurement of only one group of ellipsometric parameters. Likewise, two or more groups of known ellipsometric parameters can determine four optical parameters simultaneously. Results of actual measurements show that using the hybrid algorithm to obtain the optical parameters of double layer film is feasible and reliable, and has the effective applicability to various samples. The algorithm is suitable to inversion and actual measurement of double layer films and multi-layer films by single wavelength ellipsometer.

关键词： Ellipsometric data inversion Double layer film Simulated annealing - simplex hybrid algorithm refractive index thickness experiment results

作者: Fan Longfeng Lin Tianxia Huang Zuohua

作者单位: Laboratory of Quantum Information Technology School of Physics and Telecommunication Engineering, So Laboratory of Quantum Information Technology School of Physics and Telecommunication Engineering, So

会议类型: 国际会议

会议名称: 2012 International Conference on Measurement,Information and Control(2012测量、信息与控制国际会议 ICMIC2012)

会议地点: 哈尔滨

会议语种:英文

页码: 211-214

在线出版日期: 2012-05-18（万方平台首次上网日期，不代表论文的发表时间）