Research on FBG Pressure Sensor of Flat Diaphragm Structure

摘要：

In this paper, a FBG pressure sensor encapsulated by flat diaphragm structure is designed based on the strain characteristic of optical fiber Bragg grating (FBG) and seepage sensing principle. The structure and parameters of sensor are simulated and optimized using ANSYS finite element analysis software based on the mechanics model of flat diaphragm. The metalized FBG is processed into FBG pressure sensor, and the experimental system of flat diaphragm FBG pressure sensor is established. The theoretical and experimental results show that the pressure sensitivity coefficient of flat diaphragm FBG pressure sensor, whose measuring range is 0.5MPa, is 23×10-3(MPa)-1, and the linearity is 0.9720. The linearity of flat diaphragm structure is poor within 9KPa, which indicate that the flat diaphragm structure encapsulation is more suitable for the sensors in large measuring range.

关键词： Optical fiber Bragg grating pressure sensor flat diaphragm finite element analysis

作者: Yanling Xiong Jing He Wenlong Yang Linwen Sheng Wei Gao Yang Chen

作者单位: School of Applied Science, Harbin University of Science and Technology, Harbin 150080, China

会议类型: 国际会议

会议名称: 2012 International Conference on Measurement,Information and Control(2012测量、信息与控制国际会议 ICMIC2012)

会议地点: 哈尔滨

会议语种:英文

页码: 787-790

在线出版日期: 2012-05-18（万方平台首次上网日期，不代表论文的发表时间）