STUDY OF MICRO VIBRATION DETECTION BASED ON THE TUNNELING EFFECT

摘要：

Scanning tunneling microscopy is easily affected by the external micro vibration.The influence of vibration has already become one of main obstacles to improve the nano measurement accuracy.The technique of anti-vibration, vibration isolation and vibration compensation turns into a new branch in nano measurement field.In order to reduce the influence of micro random vibration, it is necessary to measure the external vibration to compensate the experiment result of scanning tunneling microscoy.So the experimental device is developed and experiment of vibration detection is made.The experiment results show that results have high sensitivity, good frequency characteristic and the same vibratory response characteristic consistent with scanning tunneling microscopy.

关键词： Vibration detection tunneling effect tunneling current frequency

作者: LI MENGCHAO HE ZHONGHAI

作者单位: Northeastern University at Qinhuangdao

会议类型: 国际会议

会议名称: 2011 3rd International Conference on Computer Technology and Development(2011第三届计算机技术与发展国际会议 ICCTD2011)

会议地点: 成都

会议语种:英文

页码: 1811-1814

在线出版日期: 2011-11-25（万方平台首次上网日期，不代表论文的发表时间）