Effects of Oxygen Flow on the Infrared Switching Properties of Vanadium Oxide Thin Films

摘要：

Vanadium oxide (VOX) thin films have been deposited on glass substrates with different oxygen flows (3, 3.2, and 3.6 seem) by means of magnetron sputtering process.We found that for different oxygen flows, the change of the infrared transmittance can be reached as high as 57 ％, the transmittance contrast factor can be reached as high as 88 ％,and the phase transition temperature is decreased to 54 oC, it is an ideal material for application in energy-efficient windows.According to the X-ray diffraction results of the thin films, we observed that with the increase of oxygen flow, VO2 (200) diffraction peak decreases obviously.

关键词： infrared transmittance optical phase transition temperature vanadium oxide

作者: Yao Wang Zhiming Wu Zhenfei Luo Tao Wang Yadong Jiang

作者单位: School of Optoelectronic Information,State Key laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China (UESTC).Chengdu 610054,China

会议类型: 国际会议

会议名称: 2011 IEEE International Conference on Smart Grid and Clean Energy Technologies(2011 IEEE智能电网与清洁能源技术国际会议 ICSGCE2011)

会议地点: 成都

会议语种:英文

页码: 384-386

在线出版日期: 2011-09-27（万方平台首次上网日期，不代表论文的发表时间）