Silicon Pressure Sensor Reliability Intensifying Test Qualitative Analysis

摘要：

This paper focuses on the silicon pressure sensor, and reliability of intensifying test for piezoresistive pressure sensor failure mode and failure mechanism carries on the investigation and study, and temperature stepping stress test and random vibration stepping test, based on traditional equipment of random vibration stepping test, make the product design and process defect to exposure, the results of analysis and put forward relevant measures for improvement.

关键词： Reliability aggrandizement Step stress test Reliability evaluation Random vibration

作者: Yu Li-Na zhang huixin qinli

作者单位: National Key Lab for Electronic Measurement and Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China, Taiyuan, China

会议类型: 国际会议

会议名称: The 13th IEEE Joint International Computer Science and Information Technology Conference(2011年第13届IEEE联合国际计算机科学与信息技术会议 JICSIT 2011)

会议地点: 重庆

会议语种:英文

页码: 1483-1486

在线出版日期: 2011-08-20（万方平台首次上网日期，不代表论文的发表时间）