On the Design of ZnO Films Micro Force Sensor

摘要：

This paper realized the design of ZnO films Micro force sensor by using MEMS technology. Through analyzing the principle of micro piezoelectric sensors, mkrocantilever bask structure and working principle, the paper designed the mkrocantilever beam structure of micro piezoelectric sensors, and derived micro piezoelectric sensors force - charge quantity conversion equations.

关键词： ZnO filmsS Ppiezoelectric effect Microcantilever beam MEM

作者: Huafeng Sun Sumei Gao Hongli Li

作者单位: College of Electronic and Information Engineering, Tianjin Vocational Institute, Tianjin, China

会议类型: 国际会议

会议名称: The 13th IEEE Joint International Computer Science and Information Technology Conference(2011年第13届IEEE联合国际计算机科学与信息技术会议 JICSIT 2011)

会议地点: 重庆

会议语种:英文

页码: 1762-1766

在线出版日期: 2011-08-20（万方平台首次上网日期，不代表论文的发表时间）