Optimization and Design of Reference Voltage for Capacitive Microaccelerometer

摘要：

We develop the reference voltage for readout circuit of the capacitive microaccelerometer, and propose a novel optimization method for the reference voltage to ensure the stability of accelerometer. The optimal value of 1 V can be obtained by the optimization analysis. The reference circuit is implemented and verified using TSMC 0.35 μm CMOS process. Simulation results indicate that the circuit has a temperature coefficient of 7.54 ppm/℃ from -25℃ to 125℃. By analyzing the error sources of the proposed reference circuit, we find that the circuit inaccuracy is mainly caused by the offset-voltage of operational amplifier and the MOS mismatch, while the mismatch and tolerance of resistors have relatively smaller effect.

关键词： capacitive microaccelerometer readout circuit reference voltage electrostatic actuation

作者: Daigui Liu Xuzhao Chai Xiaobo Su Xiaofeng Gu

作者单位: Key Laboratory of Advanced Process Control for Light Industry (Jiangnan University), Ministry of Edu Department of Microelectronics, School of IoT Engineering, Jiangnan University Wuxi Jiangsu, China

会议类型: 国际会议

会议名称: 2011 International Conference on Electronics and Optoelectronics(2011电子学与光电子学国际会议 ICEOE 2011)

会议地点: 大连

会议语种:英文

页码: 295-297

在线出版日期: 2011-07-29（万方平台首次上网日期，不代表论文的发表时间）