The Characteristics of ZnΧ Cd1-Χ O Films Prepared by RF Magnetron Sputtering from Powder targets
Transparent conductive zinc and cadmium oxide films were prepared under closed-field unbalanced magnetron by RF from the targets, mixed by zinc oxide and cadmium oxide powder. The influences of Zn:Cd ratios on the structures and properties of the films were investigated. The compositions, morphological structures, crystallinity, optical and electrical properties of the films were analyzed using a range of techniques, including scanning electron microscopy, X-ray diffraction, Hall Effect Measurement and spectrophotometry. The morphological structure of the coatings changed from hexahedron to tetrahedron, the preferred orientations from ZnO (002), to mixed ZnO (002) + CdO (111), and to CdO (200) as the ratio of the cadmium in the films increased. The average transmittances within the visible wavelength varied from 40％ to 90％ as the ratio of the zinc in the films increased. The lowest resistivity of the film was 10-4Ωcm, the concentration of charge carriers within 1020, the mobility over 100cm2/Vs.
RF magnetron sputtering TCO coatings Powder target
Wei Yang Yan Wen Zhou Chun Yan Zheng Fa Yu Wu Lin Liu
Univeristy of Science and Technology Liaoning No. 185 Qianshan Rd., Hi-tech District, Anshan, Liaoni School of Metallurgy, Northeastern University,No.l 1, Lane 3, WenHua Road, HePing District, Shenyang
国际会议
2011 International Conference on Electronics and Optoelectronics(2011电子学与光电子学国际会议 ICEOE 2011)
大连
英文
1236-1239
2011-07-29（万方平台首次上网日期，不代表论文的发表时间）