Design of double T-shape accelerometer based on MEMS
(0) A novel structure is proposed to design accelerometer, that is, two parallel cantilever beams are selected instead of single-beam, which would effectively improve accelerometers sensitivity.The novel structure can be integrated fabricated, which is suit for lot manufacturing.The characteristic parameters of the microstructure are analyzed by ANSYS.It can be concluded that the sensitivity is 68.9μv/g, anti-overload capacity is le5g, measuring range is± 20g.The microstructure is manufactured by means of the silicon-on-insulator craft and the thickness of the beam is 20 urn, the length is 3500 um.The test results show that the resonance frequency is 1840Hz, which is consistent with the results of the calculation and simulation.
Micro-silicon accelerometer Piezoresistive effect MEMS ANSYS
Zhang Guojun Xu Jiao Li Jun Wang Xiaoyao Zhang Wendong
Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education Science and Te Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education
国际会议
厦门
英文
301-306
2011-07-08（万方平台首次上网日期，不代表论文的发表时间）