Optimal Design of a Cantilever-based Sensor for Measuring Micro-forces

摘要：

In order to achieve the requirement of measuring forces during micromanipulation, a cantilever-based sensor using optical laser and position sensitive device (PSD) to monitor cantilever deflection is designed.To increase the resolution of the sensor at the specified measurement range, mechanical analysis and noise analysis are adopted to optimize parameters of the cantilever-based sensor.The experiment results show that the cantilever-based sensor can achieve the measurement range of 20mN and the resolution of 6.74^N.

关键词： cantilever-based sensor optimal design noise analysis

作者: Weibin Rong Guiming Huang Lefeng Wang Lining Sun

作者单位: State Key Laboratory of Robotics and System,Harbin Institute of Technology,Harbin,China

会议类型: 国际会议

会议名称: 2011 2nd International Conference on Material and Manufacturing Technology(2011第二届材料与制造技术国际会议 ICMMT2011)

会议地点: 厦门

会议语种:英文

页码: 873-877

在线出版日期: 2011-07-08（万方平台首次上网日期，不代表论文的发表时间）