Preparation and Characterization of SnO2/WO3/MWCNT Nanocomposite Thin Film for NO2 Gas Sensor

摘要：

A novel nanocomposite thin film material of SnO2/WO3 metal oxide compound doped by multi-walled carbon nanotubes (MWCNT) and its corresponding gas sensor were prepared by radio frequency (RF) reactive magnetron sputtering. The surface composition and chemical elements of the thin film material were respectively analyzed and validated by X-ray diffraction (XRD) and photoelectron spectroscopy (XPS). The influencing factors of gas sensing properties were studied and the test results of gas sensor were analyzed. The results indicated that the detection using the composite material gas sensors for low concentration NO2 toxic gas could be greatly improved by MWCNTs which were doped on the mixed oxides matrix. A possible mechanism explaining the behaviour of the thin film gas sensor was introduced.

关键词： Keywords SnO2/WO3/MWCNT Thin film RF Reactive Magnetron Sputtering NO2

作者: Lin Wei Huang Shizhen Chen Wenzhe

作者单位: College of Material Science and Engineering of Fuzhou University,Fuzhou 350002,P.R.China College of College of Material Science and Engineering of Fuzhou University,Fuzhou 350002,P.R.China

会议类型: 国际会议

会议名称: 2010 International Conference on Material and Manufacturing Technology(2010材料与制造技术国际会议 ICMMT2010)

会议地点: 重庆

会议语种:英文

页码: 99-103

在线出版日期: 2010-09-17（万方平台首次上网日期，不代表论文的发表时间）