Study on Planar Motion Table System for Nano-Machining Based on Aerostatic

摘要：

The importance of nano-machining processes is continually increasing in a wide range of industries, In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this paper, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The results of actual machining tests confirmed that the developed table system has a remarkable performance.

关键词： Table Ultra-precision Nano-machining

作者: Wang Hong-bo Sheng Guo-cheng

作者单位: Research Center of Electromechanical Technology,Zhejiang Normal University ,Jinhua,321004,China

会议类型: 国际会议

会议名称: 2010 International Conference on Material and Manufacturing Technology(2010材料与制造技术国际会议 ICMMT2010)

会议地点: 重庆

会议语种:英文

页码: 109-112

在线出版日期: 2010-09-17（万方平台首次上网日期，不代表论文的发表时间）