Theoretical studies on femtosecond laser peening of micro-craters on semiconductor Si wafer

摘要：

Femtosecond laser material processing have found potential applications for micro-and nano-meter

作者: Guangqing Du Feng Chen Xiangwei Meng Qing Yang Jinhai Si Xun Hou

作者单位: School of Electronics & Information Engineering, Xian Jiaotong University, CHINA 710049 School of Mechanical Engineering, Xian Jiaotong University, CHINA 710049

会议类型: 国际会议

会议名称: The 1st International Conference on Optofluidics 2011(第一届国际光流体大会)

会议地点: 西安

会议语种:英文

页码: 84-85

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）