Electrohydrodynamics Force Controlled Microtransfer Molding

摘要：

In this study, an alternative microtransfer molding (uTM) technique is proposed to fabricate pillar arrays not only with high-aspect-ratio but also with a 3D feature, where an electrohydrodynamics (EHD) force induced wetting effect (Fig. 1) is introduced into the conventional uTM process to achieve a controllable filling property for a dielectric liquid of pre-polymer into the high-depth hole-array of a mold (Figs. 2 a and b).

作者: Xiangming LI Jinyou SHAO Yucheng DING Hongmiao TIAN

作者单位: State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, Shaanxi, China, 710049

会议类型: 国际会议

会议名称: The 1st International Conference on Optofluidics 2011(第一届国际光流体大会)

会议地点: 西安

会议语种:英文

页码: 89-90

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）