ANALYSIS AND EXPERIMENT OF A NOVEL LINEAR MICRO ULTRASONIC MOTOR BASED ON SHEAR VIBRATION MODE
A novel linear micro ultrasonic motor, which is actuated based on shear stress mode (dl5 converse piezoelectric effect), is presented. Firstly shear vibration mode of piezoelectric stator is analyzed. The elliptical trajectory of driving point on the stator induced by shear vibration modes is discussed. Then the dynamical analysis of piezoelectric stator is carried out, and the complete structure design for the proposed linear micro ultrasonic motor ultrasonic motor is given. Finally the prototype is manufactured, and the mode experiment of piezoelectric stator is conducted. The experimental results show that the calculated vibration modes can be excited successfully.
Converse piezoelectric effect Shear vibration linear Ultrasonic motor
Haipeng CHEN Chao CHEN Mingsen GUO
State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics, Nanjing 210016, CHINA
国际会议
深圳
英文
21-23
2011-12-09（万方平台首次上网日期，不代表论文的发表时间）