THIN-FILM-BULK-ACOUSTIC-RESONATOR GAS SENSOR FOR THE DETECTION OF ORGANOPHOSPHATE VAPOR DETECTION
A novel design of an organophosphate vapor sensor based on a thin film bulk acoustic resonator (TFBAR) is presented. The TFBAR device is consisted of an A1N piezoelectric stack and a Mo/AIN Bragg reflector. Poly (vinylidene fluoride) (PVDF) is coated on the surface of the piezoelectric stack as the special sensitive layer. The concentration of the target gas can be analyzed by measuring the resonant frequency. Adsorption of organophosphate compounds onto the PVDF can increase its mass, and the frequency proportionally goes down. The results show that the TFBAR sensor can yield a rapid, sensitive, reversible and reproducible response to dimethyl methyl phosphonate (a stimulant of sarin) vapor. The gas sensitivity of the proposed sensor is 220 kHz ppm-1 in the the vapor concentration range of 2-30 ppm. This study proves that using the chemical functionalized thin film bulk acoustic resonator to detect the trace hazardous gas is feasible.
Thin film bulk acoustic resonator Gas sensor Organophosphate vapor Poly (vinylidene fluoride)
Jing-jing WANG Da CHEN Lu-yin Zhang YanXu
Jinan campus, Shandong University of Science and Technology, Jinan 250010 P R China Qingdao Key Laboratory of Terahertz Technology, College of Science, Shandong University of Science a
国际会议
深圳
英文
116-118
2011-12-09（万方平台首次上网日期，不代表论文的发表时间）