A WIRELESS PRESSURE SENSOR BASED ON SURFACE TRANSVERSE WAVE
The surface acoustic wave (SAW) pressure sensor is usually composed of a clamped circular quartz membrane, where a one-port Rayleigh wave mode resonator is fabricated. In order to improve the reliability and the accuracy of the wireless pressure sensor, a wireless pressure sensor based on surface transverse wave (STW) is studied. Combined with the perturbation theory proposed by Tiersten and the Greens function simulator, the pressure-induced frequency shifts for STW on quartz are calculated. The calculated results demonstrate that the cut orientation in vicinity of BT cut membrane has simultaneously both high pressure sensitivity and delay temperature stability of STW. The pressure sensitivity is over three times that of the ST-cut quartz for SAW. In order to further improve the sensitivity of the sensor, a novel cantilever package is proposed. The geometry of the sensor is determined by using FEM software. The experimental data show that the pressure sensitivity is sufficiently high and the relative frequency shift varies linearly.
surface transverse wave pressure sensor wireless
A-LongKANG Wei-Biao WANG You-QunLIU TaoHAN
Shanghai Jiaotong University, Shanghai 200240, China No.55 Institute of China Electronics Technology Group Corporation, Nanjing 210038, China
国际会议
深圳
英文
231-235
2011-12-09（万方平台首次上网日期，不代表论文的发表时间）