ANALYSIS OF THE VIBRATION OF FILM BULK ACOUSTIC WAVE RESONATORS BASED ON MINDLIN PLATE THEORY
Analytical solutions for vibration of Film Bulk Acoustic wave Resonators (FBAR) are obtained based on Mindlin plate theory. The electrodes are considered as layers of plates with their own stiffness and mass properties. The differential equations of motion are derived including the thickness-shear and flexural mode. First order approximation is applied to study the vibration of FBAR. The dispersion relation of the vibration and the frequency spectrum are obtained. Numerical results show that the shift of dispersion relation between with and without electrodes consideration.
Paper Layered structures Mindlin plate theory Analytical solution
Dej in HUANG Ji WANG
School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China
国际会议
深圳
英文
328-331
2011-12-09（万方平台首次上网日期，不代表论文的发表时间）