An ELECTRONIC MODLE of MEMS DISK RESONATOR

摘要：

RF-MEMS resonator can meet the development of communication and attract great attention now. Applied to electric system, mechanical resonator caused some difficulties to the circuit design, the electric parameters should be extracted. Through mechanical-electrical analogy the electronic parameter is extracted and the electrical equivalent circuit established. ANSYS is used to simulate the vibration of the disk. Using the electronic parameters, an oscillator is designed and simulated.

关键词： MEMS resonato frequency Q electronic parameters oscillator

作者: JIA Ying-qian Zhao Zheng-ping

作者单位: Shijiazhuang University, Shijiazhuang, China China Electronics Technology Group corporation, Beijing，China

会议类型: 国际会议

会议名称: 2011 International Conference on Advanced Materials and Engineering Materials(2011先进材料与工程材料国际会议 ICAMEM 2011)

会议地点: 沈阳

会议语种:英文

页码: 278-282

在线出版日期: 2011-11-22（万方平台首次上网日期，不代表论文的发表时间）