Spectrometer-on-a-chip Based on Echelle Diffraction Grating in SiON Waveguides

摘要：

We demonstrate a spectrometer-on-a-chip based on echelle diffraction grating (EDG) in silicon oxynitride (SiON) waveguides for operation in 850nm wavelength range. The chip comprises 120 output waveguides with 0.25 nm spacing and has a size of only 11mm×6mm. The measured adjacent channel crosstalk is close to 30 dB, the 3dB channel bandwidth is < 0.1 nm and the channel non-uniformity is 3dB for wavelength from 838nm to 852nm.

关键词： spectrometer-on-a-chip planar waveguide grating sensing echelle grating SiON waveguides

作者: Xiao Ma Mingyu Li Jian-Jun He

作者单位: Centre for Integrated Optoelectronics, State Key Laboratory of Modern Optical Instrumentation,Zhejiang University, Hangzhou, PR China, 310027

会议类型: 国际会议

会议名称: 2011亚洲光纤通信与光电国际会议

会议地点: 上海

会议语种:英文

页码: 1-2

在线出版日期: 2011-11-13（万方平台首次上网日期，不代表论文的发表时间）