Low-voltage, carrier-depletion Mach-Zehnder silicon optical modulator for COMS compatible integration

摘要：

As a result of the low modulation efficiency of carrier-depletion Mach-Zehnder silicon optical modulator, it always needs a high voltage around 6 V, which is very difficult to supply in an integrated high-speed CMOS chip. We demonstrate a carrier-depletion Mach-Zehnder silicon optical modulator which works at a low voltage. Its coplanar waveguide electrode is carefully designed to make sure the electrical wave loss along the device is low. The device operates well at a data rate of 12.5 Gb/s, whose phase-shifter length is 2 mm. Voltages with the swinging amplitudes being 1 V and 2 V are applied to the device with the reverse bias voltages of 2 V and 2.3 V. The extinction ratios are 4.78 and 9.49 dB respectively.

关键词： low voltage swing depletion silicon Mach- Zehnder Interferometer

作者: Jianfeng Ding Hongtao Chen Ruiqiang Ji Yonghui Tian Lei Zhang Lin Yang

作者单位: Optoelectronic System Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, China

会议类型: 国际会议

会议名称: 2011亚洲光纤通信与光电国际会议

会议地点: 上海

会议语种:英文

页码: 1-4

在线出版日期: 2011-11-13（万方平台首次上网日期，不代表论文的发表时间）