Investigation on the Low Cost 2ωYLF Laser Crystallization Poly-silicon Technology
The 2ωYLF laser crystallization technology with a low cost has been investigated in this paper. We have designed and established a 2ωYLF laser crystallization system by ourselves. The YLF laser has been used as the laser source. Then, the influences of the 2ωYLF laser crystallization parameters on the performances of the resulted poly-Si have been studied. Based on the optimization of the 2ωYLF laser crystallization condition, the sequential lateral solidification (SLS) has been achieved. The grain size is several micron meters.
2ωYLF laser crystallization poly-silicon sequential lateral solidification AMOLED
Chunjian Yin Juan Li Chengzhi Ye Ning Liu Shaozhen Xiong
Institute of Photoelectronics, Nankai University,Tianjin300071, China
国际会议
China Display/Asia Display 2011(2011年中国显示/亚洲显示会议)
江苏昆山
英文
683-686
2011-11-07（万方平台首次上网日期，不代表论文的发表时间）