Study on Dynamic Scanning Performance of a 2-axis MEMS Electrothermal Micromirror

摘要：

An MEMS-based pico-projector is reported in this paper. The scanning element is an electrothermal MEMS micromirror with a unique three-segment bimorph actuator design. A testing apparatus has been built to assess the dynamic scanning performances of the micromirror. The phenomena of dynamic hysteresis and distortion are observed and systematically analyzed. It is measured that the phase delay between the excitation signal and the scanning angle measured by a PSD is 11.25° at 30 Hz. Optics design are utilized to minimize the image distortion. Several scanning patterns such as a round, a rhodonea curve, and a grating have been obtained.

关键词： Pico-projector MEMS elctrothermal microactuator dynamic hysteresis distortion

作者: KaiLi Liu YongMing Tang ShuMing Lan HuiKai Xie

作者单位: School of Electronic Science and Engineering, Southeast University, Nanjing, China Wuxi WiO Technology Co,Ltd, Wuxi, Jiangsu, China Wuxi WiO Technology Co,Ltd, Wuxi, Jiangsu, China Department of Electrical and Computer Engineering,

会议类型: 国际会议

会议名称: China Display/Asia Display 2011(2011年中国显示/亚洲显示会议)

会议地点: 江苏昆山

会议语种:英文

页码: 775-777

在线出版日期: 2011-11-07（万方平台首次上网日期，不代表论文的发表时间）