Challenges and Strategies in Advanced CMOS Technology Development

摘要：

The ongoing drive for increased speed and density of CMOS technology requires the continuous innovation of advanced elements and processes. With the development of new materials also comes new manufacturing challenges. In this paper, we will give an overview on the technology and process challenges, innovation roadmap, and manufacturability strategies. We will also discuss the importance of collaboration in the CMOS business model.

作者: Xiaomeng Chen

作者单位: Semiconductor Research and Development Center, Microelectronics Division, IBM, NY 12533, USA

会议类型: 国际会议

会议名称: 2011 IEEE 9th International Conference on ASIC(2011年第九届IEEE国际专用集成电路大会)

会议地点: 厦门

会议语种:英文

页码: 466-468

在线出版日期: 2011-10-25（万方平台首次上网日期，不代表论文的发表时间）