Aluminum Nitride Reconflgurable RF-MEMS Front-Ends
Aluminum Nitride based piezoelectric microelectromechanical systems (MEMS) technology has the potential to develop a fully integrated radio frequency (RF) platform that satisfies the requirements of next-generation communicatien standards: reconfigurability, miniaturization, and low power consumption. Here we report on the recent developments of this A1N thin-film based technology, namely resonators, filters, oscillators and switches. These examples highlight how MEMS will enable the mass manufacturing of reconfigurable RF front-ends.
Augusto Tazzoli Matteo Rinaldi Chengjie Zuo Nipun Sinha
Jan Van Der Spiegel, Gianluca Piazza Department of Electrical and Systems Engineering, University of Pennsylvania 200 S. 33rd Street, Philadelphia. PA, USA
国际会议
2011 IEEE 9th International Conference on ASIC(2011年第九届IEEE国际专用集成电路大会)
厦门
英文
1123-1126
2011-10-25（万方平台首次上网日期，不代表论文的发表时间）