Modal Analysis of a new Solid Micro-Gyroscope with Bulk Giant Magnetostrictive Material (GMM) Resonator
Employing unique advantage of giant magnetostrictive strain of giant magnetostrictive material (GMM) for improving reference vibration amplitude, a novel bulk GMM solid MEMS gyroscope, which has small and simple structure and is capable of detecting 2-axis angular rate with improved sensitivity, is proposed. The device structure and operation principle of the gyroscope are presented. Using finite element method (FEM), modal analyses, for whole solid GMM cube and for bulk GMM cube composed of multilayer GMM plates, are conducted. The results show that the fourth order vibration mode for the former and the first order vibration mode with lower frequency of dozens of KHz for the latter were found to meet the working vibratory mode of the gyro sensor. This work of the paper provides theory foundation for structural optimization design and fabrication of the microgyroscope.
microgyroscope giant magnetostrictive material (GMM) modal analysis FEM
Xihui Du Feng Cui Xiaosheng Wu Wu Liu Weiping Zhang Wenyuan Chen
National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology,Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
国际会议
大连
英文
301-304
2011-10-19（万方平台首次上网日期，不代表论文的发表时间）