会议专题

Effect of Ar/O2 Ratio and Substrate Temperature on the Hydrophilicity of SiO2Thin Films Prepared by RF Reactive Magnetron Sputtering

SiO2 thin films were prepared on stainless steel substrate by RF reactive magnetron sputtering. Their microscopic surface morphology was characterized by atomic force microscope (AFM) and static contact Angle (SCA) was applied to evaluate hydrophilicity of films. It was found that SiO2 thin films showed super hydrophilicity which could last long at Ar/O2 ratio of 6:4; under such condition, substrate temperature also affects hydrophilicity of films, the best of which can be obtained at 90 °C.

Ar/O2 Ratio Substrate Temperature SiO2 Thin Films Super Hydrophilicity

Song-Hua Gao Li-Hua Gao

Shool of Physics and Mechanical & Electrical Technology, Sanming University, Sanming 365004, China

国际会议

2011 International Conference on Machanical Engineering,Materials and Energy(2011年机械工程、材料与能源国际会议 ICMEME 2011)

大连

英文

842-845

2011-10-19(万方平台首次上网日期,不代表论文的发表时间)