Micromachined PMN-PT Single Crystal Diaphragm for Piezoelectric Sensing Applications

摘要：

In this article, we demonstrate a piezoelectric micromachined diaphragm device based on PMN-PT single crystal thin layer. The electrical properties of the device are characterized. A finite element analysis is carried out for the fabricated model. Harmonic analysis is performed to investigate the vibrational modalities of the diaphragm. The FEA results show very good agreement with the experimental data. As an application example, a diaphragm device is coated with thiol carboxylic PEG (MW 5,000DA) as a resonator for bio mass sensing. The devices are also useful for many other applications including acoustic sensing, ultrasonic transducing, and vibration sensing, etc.

关键词： PMN-PT single crystal piezoelectric sensing

作者: Jue Peng Xinyu Zhang Guo Dan Tianfu Wang Siping Chen

作者单位: Shenzhen Key Laboratory of Biomedical Engineering, Department ofBiomedical Engineering School of Medicine, Shenzhen University, Shenzhen, China

会议类型: 国际会议

会议名称: 2011 4th International Conference on Biomedical Engineering and Informatics(第四届生物医学工程与信息学国际会议 BMEI 2011)

会议地点: 上海

会议语种:英文

页码: 1150-1153

在线出版日期: 2011-10-15（万方平台首次上网日期，不代表论文的发表时间）