Simple Fabrication Process for Thickness-tunable GMR Biosensor

摘要：

This work demonstrates a simple fabrication process for the guided-mode resonance biosensors with tunable thickness. Although consisted of the waveguide layer and the grating layer, the GMR biosensor can be simply fabricated in single step and of the same material by the conventional embossing technique. Moreover, the thickness of waveguide can be well controlled by applying various embossing force in process. It is shown that the tunable range of the thickness approximately to 12.5％, however still to keep the deformation on the grating layer less than 10％. The whole fabrication process can be as quick as lesser than 10 minutes.

关键词： soft lithography spin-on glass grating waveguide subwavelength embossing

作者: Jiann-Hwa Lue Ting-Jou Ding Tsung-Hsun Yang

作者单位: Department of Optics and photonics National Central University Chungli 32001, Taiwan

会议类型: 国际会议

会议名称: 2011 4th International Conference on Biomedical Engineering and Informatics(第四届生物医学工程与信息学国际会议 BMEI 2011)

会议地点: 上海

会议语种:英文

页码: 2006-2009

在线出版日期: 2011-10-15（万方平台首次上网日期，不代表论文的发表时间）