Numerical Simulation of Nanoparticle Pattern Fabricated by Electrostatic Spray Deposition
Patterning of nanoparticle over large areas is a prerequisite for realizing nanodevices. Electrospray deposition (ESD) as a patterning method of nanoparticle deposited on a substrate has attracted great attentions recently due to several advantages over the other deposition methods. However, obtaining an optimum ESD processing condition for nanoparticle pattern relies heavily on many trial experiments because of the lack of a reliable numerical simulation technique. In this study, the deposition characteristics of nanoparticle generated by electrospray were investigated with numerical method by using a threedimensional Lagrangian model. Three important process parameters including solution dielectric constant, applied voltage and surface charge density on mask were considered by fixing the geometrical parameters of ESD device. The simulation result shows that with the increase of solvent dielectric constant, the spray diameter also increases. The higher applied voltage will make spray area wider. The focusing controllability by changing surface charge density on mask was confirmed, and the higher surface charge density would result in more focused deposition. The validity of the numerical simulation technique developed in this study was verified by comparing with experimental data.
Nanoparticle pattern Electrospray deposition Deposition characteristics Lagrangian model
Wei Wei Sheng Wang Zhaolin Gu Takeshi Fukuda Kiwamu Kase Jungmyoung Ju Yutaka Yamagata Yusuke Tajima
Xian Jiaotong University,No.28,Xianning West Road,Xian,Shaanxi,710049,P.R. China RIKEN Institute,2-1 Hirosawa,Wako City,Saitama 351-0198,Japan Saitama University,255 Shimo-Okubo,Sakura-ku,Saitama 338-8570,Japan
国际会议
西安
英文
900-906
2011-08-17（万方平台首次上网日期，不代表论文的发表时间）