Comparative Study on Steam Humidification Type and Water Spray Humidification Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms
In a recent large-scale semiconductor manufacturing clean room, in order to improve clean room air quality, air washers are used to remove suspended particles and airborne gaseous contaminants such as NH3, SOx and organic gases from the outdoor air introduced into clean room. At the same time air washers can humidify the incoming outdoor air because of water spray evaporation, which can replace steam humidification in wintertime. From the energy saving point of view, compared with steam humidification by fossil fuel boiler water spray humidification technique can be regarded to be useful for the reduction of air conditioning energy consumption for the clean room. In the present study, an experiment with an outdoor air flow of 1000 m3/h was conducted to compare the air conditioning process and energy consumption of steam humidification type and water spray humidification type outdoor air conditioning systems. It was shown from the experimental results that the water spray humidification type outdoor air conditioning system exhibited lower electric power consumption and was more energy-efficient for the winter operation than the steam humidification type one.
Semiconductor Manufacturing Clean Room Outdoor Air Conditioning System Steam Humidification Water Spray Humidification Energy Reduction
Kyung-Hoon Yoo Hyung-Tae Kim Gen-Soo Song Seung-Woo Son Dug-Jun Park
Nanoscale Contamination Control Laboratory,Korea Institute of Industrial Technology (KITECH),1271-18 Sunglim PS Co.,1301,Namseong Plaza,345-30,Gasan-dong,Geumcheon-gu,Seoul,153-802 Shinsung ENG Co.,404-1,Baekhyeon-dong,Bundang-gu,Seongnam-si,463-420
国际会议
西安
英文
1019-1023
2011-08-17（万方平台首次上网日期，不代表论文的发表时间）