Properties of Aluminum Oxide (AIOX) Barrier Coatings De-posited on Poly (Ethylene Terephthalate) (PET) Substrates by Reactive Magnetron Sputtering
The aluminum oxide (A1Ox) coatings were deposited on poly (ethylene terephthalate) (PET) surface by reactive magnetron sputtering for improving its barrier property. With O2 flux increasing, three modes including metallic mode, transition mode and oxide mode exist in sputtering. The properties of the aluminum oxide (AlOx) coatings prepared at different modes were discussed. Also, the influences of oxygen flux on the stoichiometry, structure, gas permeation of the coatings were investigated. The chemical composition of AlOx films fabricated in transition mode is different as oxygen flux varies slightly, and the gas barrier property is better as the stoichiometry is closer to 1.5 with oxygen flux increasing. The coating uniformity, roughness and particle size depend remarkably upon oxygen flux. The coatings deposited at oxide mode have a good barrier performance to oxygen and water, and the permeability to oxygen decreases by sixty times and water vapor ten times compared with uncoated PET
permeation barrier aluminum oxide magnetron sputtering poly (ethylene terephthalate) (PET)
Liu Zhuang Ma Xinxin Sun Zhihui Xu Fangjun
Harbin Institute of Technology, Harbin 150001, China Harbin University of Commerce, Harbin150028, Ch Harbin Institute of Technology, Harbin 150001, China Harbin University of Commerce, Harbin 150028, China
国际会议
西安
英文
268-271
2011-05-11（万方平台首次上网日期，不代表论文的发表时间）