Effects of Al Content on Microstructure and Mechanical Property of CrAIN Coating Synthesized by Reactive Mag-netron Sputtering

摘要：

A series of CrAIN coatings with different Al content were synthesized on high-speed steel (M2) substrate by reactive direct current (DC) magnetron sputtering. The influences of Al content on the microstructure and mechanical property of CrAIN coatings were studied by scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive spectrum (EDS) and nano-indentation techniques, respectively. The results indicate that the coatings exhibit only fee c-CrN phase when Al content is less than 65 at％, and fee c-CrN and c-AIN phases when Al content is 78 at％. The coating with Al content of 60 at％ exhibits high hardness and elastic modulus. The maximum hardness and elastic modulus values could reach 36.8 GPa and 459.5 GPa, respectively.

关键词： CrAIN coating magnetron sputtering Al content microstructure mechanical property

作者: Li Wei Liu Ping Zheng Kangpei Ma Fengcang Liu Xinkuan Chen Xiaohong Yang Lihong

作者单位: University of Shanghai for Science and Technology, Shanghai 200093, China

会议类型: 国际会议

会议名称: 第六届表面工程国际会议

会议地点: 西安

会议语种:英文

页码: 425-428

在线出版日期: 2011-05-11（万方平台首次上网日期，不代表论文的发表时间）