Working Pressure Induced Microstructure and Stress Evolution of Sputtered ZrN Coatings
Wu Zhengtao@China National R&D Center for Tungsten Technology, Xiamen 361005, China;Peng Dongliang@Xiamen University, Xiamen 361005, China;Wu Chonghu@China National R&D Center for Tungsten Technology, Xiamen 361005, China The influence of working pressure on microstructure and residual stress evolution of magnetron sputtered ZrN coatings were systemically investigated. XPS and XRD results reveal that all as-deposited coatings at varying working pressure are stoichiometric ZrN with cubic NaCl structure. A decrease in working pressure results in preferred orientation evolution from (111) to (200). This evolution is driven by kinetics processes, such as adatom surface migration and competitive grain growth, rather than by thermodynamic. This explanation is also supported by morphology characterization as the surface and crosssection morphologies transition from tapered shape and columnar structure to round and non-columnar (equiaxed) structure.
ZrN coating working pressure preferred orientation residual stress microstructure
Qi Zhengbing Yan Weili Hong Jinqing Zhu Fangping Sun Peng Wang Zhoucheng
Xiamen University, Xiamen 361005, China
国际会议
西安
英文
429-432
2011-05-11（万方平台首次上网日期，不代表论文的发表时间）