On-Chip Force Sensing by Magnetically Driven Microtool for Measurement of Stimulant Property of P. laevis
In this paper, we newly propose an on-chip force sensing by using a magnetically driven microtool (MMT) equipped with a frame structure for measurement of stimulant property of Pleurosira laevis. The design and fabrication of the force sensing structure with a displacement magnification mechanism based on beam deformation is discussed. Through the basic experiments, the advantages of the proposed layer fabrication technique and the performance of the force sensor are confirmed. The basic characteristics of P. laevis are also confirmed by using the developed MMT.
Tomohiro Kawahara Masakuni Sugita Masaya Hagiwara Yoko Yamanishi Fumihito Arai Hiroyuki Kawano Ikuko Shihira-Ishikawa Atsushi Miyawaki
School of Engineering,Nagoya University,Nagoya 464-8603,Japan PRESTO,Japan Science and Technology Agency,Tokyo 102-0075,Japan School of Engineering,Nagoya University,Nagoya 464-8603,Japan as well as Seoul National University Brain Science Institute,RIKEN,Saitama 351-0198,Japan
国际会议
2011 IEEE International Conference on Robotics and Automation(2011年IEEE世界机器人与自动化大会 ICRA 2011)
上海
英文
273-278
2011-05-09(万方平台首次上网日期,不代表论文的发表时间)