Modeling and Control of Rate-Dependent Hysteresis for a Piezo-Driven Micropositioning Stage
Piezoelectric hysteresis usually relies on the frequency of the input signal. Most of the existing rate-dependent models use a lot of parameters to capture the rate-dependent hysteresis. In this paper, a simple rate-dependent hysteresis model is proposed to describe the frequency dependency effect of a micropositioning stage driven by piezoelectric actuators. This model is extended from an enhanced Coleman-Hodgdon (C-H) model. It has only 9 parameters and exhibits an accuracy better than 97％. The dependencies of the model parameters on the input rate are derived based on open-loop experimental tests. As inverse rate-dependent C-H model is established to construct a feedforward compensation. Experimental results demonstrate the effectiveness of the rate-dependent model over the traditional rate-independent one. The feedforward in conjunction with a PID feedback control is constructed to further attenuate the modeling errors and creep effects. Results show that the combined control scheme suppresses the tracking error by more than 8 times compared to the stand-alone PID control. It provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.
Qingsong Xu Yangmin Li
Department of Electromechanical Engineering,Faculty of Science and Technology, University of Macau, Av. Padre Tom(a)s Pereira, Taipa, Macao SAR, P. R. China
国际会议
2011 IEEE International Conference on Robotics and Automation(2011年IEEE世界机器人与自动化大会 ICRA 2011)
上海
英文
1670-1675
2011-05-09（万方平台首次上网日期，不代表论文的发表时间）