Dual Mode Predictive Control for Ultrafast Piezoelectric Nanopositioning Stages
Precision control of piezoelectric motor nanopositioning stages is widely used in a variety of nano-manufacturing equipments. But due to the hysteresis nonlinearity with input saturation, it is challenging to design an ultrafast output feedback controller with large region of closed-loop stability. To address this problem, we developed a dual-mode nonlinear model predictive control (NMPC) method, in which an optimal input profile found by solving an open-loop optimal control problem drives the nonlinear system state into the terminal invariant set; afterwards a linear output-feedback controller steers the state to the origin asymptotically. In contrast to the classical output-feedback controller, the settling time is effectively decreased and the closed-loop stable region is substantially increased by the present NMPC with almost no loss of the nanopositioning accuracy. Finally, the feasibility and superiority of the proposed switching control method are examined by extensive experiments on a Physik Instrumente P-563.3CL triple-axis nanopositioning stage.
Hai-Tao Zhang Xiang Chen Zhiyong Chen
State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Scienc School of Electrical Engineering and Computer Science,University of Newcastle,Callaghan,NSW 2308,Aus
国际会议
2011 IEEE International Conference on Robotics and Automation(2011年IEEE世界机器人与自动化大会 ICRA 2011)
上海
英文
3622-3627
2011-05-09（万方平台首次上网日期，不代表论文的发表时间）