Silicon Capillary Gripper With Self-alignment Capability

摘要：

This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon using deep reactive ion etching and is designed to be especially suitable for selfalignment. The gripper is shown to retain its self-alignment capabilities even when the head of the gripper does not match the size of the component. This mechanism is analyzed using numerical simulations and tested in pick-and-place experiments using commercial laser diode components. The advantage of the capillary microgripper has been demonstrated in picking and aligning microchips from adhesive films, which requires substantial picking force.

关键词： Micro/Nano Robots Microhandling Capillary gripper Self-alignment

作者: Veikko Sariola Ville Liimatainen Tatu Tolonen Reidar Udd Quan Zhou

作者单位: Department of Automation and Systems Technology School of Science and Technology,Aalto University Espoo,Finland

会议类型: 国际会议

会议名称: 2011 IEEE International Conference on Robotics and Automation(2011年IEEE世界机器人与自动化大会 ICRA 2011)

会议地点: 上海

会议语种:英文

页码: 4098-4103

在线出版日期: 2011-05-09（万方平台首次上网日期，不代表论文的发表时间）