Petri Net-Based Cycle Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting and Swapping Strategy
There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.
NaiQi Wu Feng Chu Chengbin Chu MengChu Zhou
Department of Industrial Engineering,School of Mechatronics Engineering,Guangdong University of Tech Laboratoire dIBISC FRE CNRS 3190,Université dEvry Val dEssonne,CE 1455 Courcouronnes 91020 Evry C Laboratoire G(e)nie Industriel,Ecole Centrale Paris,Grande voie des Vignes,92295 CH(A)TENAY-MALABRY The MoE Key Laboratory of Embedded System and Service Computing,Tongji University,Shanghai 200092,Ch
国际会议
2011 IEEE International Conference on Robotics and Automation(2011年IEEE世界机器人与自动化大会 ICRA 2011)
上海
英文
5499-5504
2011-05-09（万方平台首次上网日期，不代表论文的发表时间）